Lieberman, M. A. <br/><br/>
Principles of plasma discharges and materials processing / 

 - 2nd ed. 
 - Hoboken, N.J. :  Wiley-Interscience,  2005. 
 - xxxv, 757 p. :  ill. ; 
<br/><br/><label>ISBN: </label>0471720011  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma dynamics.<br/>Thin films<br/>Plasma etching.<br/>Plasma chemistry
<br/><br/><label>LC Class. No.: </label>MED QC718.5.D9  / L54