000 00329nam a22001457a 4500
020 _a9782954201504
050 _aMED HQ1426
_b.F63
100 _aChollet, Franck
245 _aA (not so) short introduction to MEMS
260 _bMemscyclopedia.Org
300 _a257p.
650 _aMems
700 _aLiu,Haobing
942 _cBK
999 _c37312
_d37312