Principles of plasma discharges and materials processing / (Record no. 14092)

MARC details
000 -LEADER
fixed length control field 00773cam a2200229 a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 0471720011
050 00 - LIBRARY OF CONGRESS CALL NUMBER
Classification number MED QC718.5.D9
Item number L54
100 1# - MAIN ENTRY--AUTHOR NAME
Personal name Lieberman, M. A.
245 10 - TITLE STATEMENT
Title Principles of plasma discharges and materials processing /
250 ## - EDITION STATEMENT
Edition statement 2nd ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication Hoboken, N.J. :
Name of publisher Wiley-Interscience,
Year of publication 2005.
300 ## - PHYSICAL DESCRIPTION
Number of Pages xxxv, 757 p. :
Other physical details ill. ;
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Plasma dynamics.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Thin films
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Plasma etching.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Plasma chemistry
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Lichtenberg, Allan J.
856 42 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://www.loc.gov/catdir/enhancements/fy0618/2004058503-b.html
856 42 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://www.loc.gov/catdir/enhancements/fy0618/2004058503-d.html
856 41 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://www.loc.gov/catdir/enhancements/fy0618/2004058503-t.html
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Books
Holdings
Withdrawn status Lost status Not for loan Home library Current library Shelving location Date entered Source of acquisition Cost, normal purchase price Full call number Bar code Koha item type
      Directorate of Library Services Directorate of Library Services Old Books Collection 08/21/2021 BOOK AID 78000.00 MEDQC718.L53 000000001285 Books